Poly-Flow Engineering LLC Quartzware Cleaner

Triple Tower Here is the classic Poly-Flow vertical quartz tube cleaner proven by use in countless fabs around the world. The S-417 features three distinctive types of cleaning for all your horizontal furnace parts. Tubes are consistently etched with the patented Turbo-Nozzle^tm to selectively clean the inside and outside. Paddles, cantilevers, sheaths and master boats are rotated on the original carousel providing 360-degree etching and rinsing. Boats and assorted small parts are immersion etched in the 16” X 12” X 12” sink located below the carousel. All of the safety features pioneered by Poly-Flow are built-in, not added on. Pressure switches and sensors for DI water, nitrogen, and exhaust help avoid costly problems. Interlocked process chambers and maintenance panels help keep your technicians out of trouble. Automatic dual drain valves with split programming segregate high concentration fluoride wastes from general acid waste to lower your effluent treatment costs. Monitored secondary containment for the plumbing compartment and a low acid volume allow compliance with building and safety regulations.
PROCESS Operator blends chemicals in holding tanks from BCDS. Tubes are sprayed with concentrated acid inside and/or outside. Solution(s) recirculated as programmed. Parts fixtured on the carousel are spray etched and rinsed. Parts in sink are immersion etched and rinsed. Single use acid is sprayed on all parts for a final etch from dedicated piping. Both chambers can be programmed to operate during a single recipe. SPECIAL FEATURES Full rear service. Desktop PCMS compatible. Left chamber has a rotating carousel for cantilevers, boats, t/c. Sink for end caps, boats, and small parts in left chamber. Right chamber holds a tube or liner up to 12" in diameter. Facilities box standard. Poly-Mix standard. MATERIALS Cabinet: White Polypropylene (std.), Flame retardant polypropylene (CE), CP7-D (Opt’l), FM-4910 compliant CPVC with PFDF interior (opt'l). Process Sink: Natural polypropylene. Pressure piping: Natural PVDF and Teflon. Chemical Holding Tanks: Natural PVDF. Drains: Natural PVDF. Wetted surfaces: Natural PVDF, Teflon, clear PVC, natural polypropylene. MATERIAL COMPATIBILITY HF, Nitric, Acetic, HCl. BCDS INTERFACE Dual POC; one for HF directed to each chemical holding tank. Second POC for nitric acid directed to each recirculating chemical tank. External connections for ready signal, demand signal, BCDS ready signal and EMO contacts. FIRE DETECTION Optional with or without CO₂ suppression. OVERALL SIZE 54" left to right, 32" front to rear, 121.5" tall SINK SIZE 16" x 12" x 12" deep. HOLDING TANK SIZE 17 gallons - recirculating tank. 10 gallons - for final etch. ULTRASONIC AGITATION None DRAINS HF Waste Drain. Acid Waste Drain. FACILITIES CONNECTIONS Drains: lower rear of tool. Pressurized: lower rear of tool. Main power: rear of tool. Exhaust: upper rear of tool.