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MultiSpec 280 Box & Cassette Cleaner
-Batch cleaning of
SMIF Pods, boxes and cassettes
-No metals in the process stream
-Vertical design reduces total
floor space by 60%.
-Lightly heated HEPA filtered air
directed throughout the process chamber to speed drying
(Printer-friendly
datasheet)
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MultiSpec 277-I
-FOUP
& FOSB Cleaner
-Manual load high through put
-No high speed rotation
-Ultra clean process with no metals in the
process stream
-Lightly heated HEPA filtered air
directed throughout the process chamber to speed drying
(Printer-friendly
datasheet)
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MultiSpec 277-II
-The
MS-277-II Fully Automated/Factory Integrated system is in the final
engineering stages.
The engineering package will be completed by May 2008 including many new
features and benefits. In addition, a demo unit will be completed by July
2008. Please contact the sales
department or your local representative
for more details.
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datasheet) |
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PROCESS ONE FX30
The
Process One FX30 cleaning system is Poly-Flow’s competitively priced
system specially designed for 300 mm FOUP’s and FOSB’s. The FX30 provides
superior cleaning and drying performance in a compact unit using our
patented solution isolation technology (separating the inside process
water from the outside process water). The small footprint and all
natural polymer wetted surfaces make the FX30 the perfect tool by reducing
metallic contamination while giving you the ability to add systems as your
FAB ramps up! Please contact the
sales department or your
local representative for more details.
(Printer-friendly
datasheet) |
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Process One HTC 8030
The Process One HTC 8030 clean system is Poly-Flow’s very
competitively priced system with flexible basket configurations for
cleaning wafer carriers, shippers, storage boxes, SMIF Pods, Disk
carriers, masks and reticle carriers. Please contact the
sales department or your
local representative
for more details
(Printer-friendly
datasheet) |
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